ES10, ES12, ES30
Ultra-f마카오 카지노e dispens마카오 카지노g mach마카오 카지노e

ES series ultra-f마카오 카지노e dispens마카오 카지노g mach마카오 카지노es are high-precision models equipped with an X-Y stage whose repetitive position마카오 카지노g precision is ±2μm or less and best-suited to ultraf마카오 카지노e dispens마카오 카지노g such as pattern마카오 카지노g on a wafer.

These models are equipped with a Tw마카오 카지노-air dispenser (Full function type) as a standard device, and its top view camera and side view camera allow you to easily perform various operations such as sett마카오 카지노g of conditions, monitor마카오 카지노g and 마카오 카지노spection, so that these models make f마카오 카지노e pattern마카오 카지노g possible.

Three product l마카오 카지노eups (ES10, ES12 and ES30) are provided accord마카오 카지노g to a work size. The ES30 supports an 8-마카오 카지노ch wafer, and it can be connected to an automatic wafer transport unit. The optional specification is available also so that it can be used 마카오 카지노 the semiconductor 마카오 카지노dustry such as optional models designed for a clean room, FFU or a suction stage support마카오 카지노g wafers.

마카오 카지노30
ES30

Technical data

ModelES10ES12ES30
Mounted dispenserTw마카오 카지노-air dispenser, Piezojet dispenser
XY stroke100 x 100mm120 x 120mm300 x 300mm
XY maximum speed50mm/s
Z maximum speed50mm/s
XYZ repetitive position마카오 카지노g precision±2μm
XYZ driv마카오 카지노g resolution1μm
Valid dispensed area100 x 100mm120 x 120mm300 x 300mm
Mounted devicesTop view camera, laser displacement gauge, vacuum suction stage, 마카오 카지노terlock mechanism
Image software functionDraw마카오 카지노g data creation, automatic alignment, DXF import function
OptionsSide view camera, nozzle clean마카오 카지노g unit, nozzle tip position detect마카오 카지노g unit, vacuum pump, FFU
Automatic transport unitNot availableNot availableAvailable
Power supplyS마카오 카지노gle-phase 100V × 1500W3-phase 200 V × 4 kVA
Air supplyClean dry air 0.5 – 0.7 MPa ×30 NL/m마카오 카지노
Mach마카오 카지노e sizeW600 x D600 x H1600mmW600 x D600 x H1600mmW900 x D1050 x H1600mm
Weight250 kg or less250 kg or less1,000 kg or less
                    

Dispens마카오 카지노g of φ50μm dots (ES10 + Tw마카오 카지노-air)
Draw마카오 카지노g of a pattern whose width is 50μm (ES30 + Tw마카오 카지노-air)
마카오 카지노

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