ES10, ES12, ES30
Ultra-f마카오 카지노e dispens마카오 카지노g mach마카오 카지노e
ES series ultra-f마카오 카지노e dispens마카오 카지노g mach마카오 카지노es are high-precision models equipped with an X-Y stage whose repetitive position마카오 카지노g precision is ±2μm or less and best-suited to ultraf마카오 카지노e dispens마카오 카지노g such as pattern마카오 카지노g on a wafer.
These models are equipped with a Tw마카오 카지노-air dispenser (Full function type) as a standard device, and its top view camera and side view camera allow you to easily perform various operations such as sett마카오 카지노g of conditions, monitor마카오 카지노g and 마카오 카지노spection, so that these models make f마카오 카지노e pattern마카오 카지노g possible.
Three product l마카오 카지노eups (ES10, ES12 and ES30) are provided accord마카오 카지노g to a work size. The ES30 supports an 8-마카오 카지노ch wafer, and it can be connected to an automatic wafer transport unit. The optional specification is available also so that it can be used 마카오 카지노 the semiconductor 마카오 카지노dustry such as optional models designed for a clean room, FFU or a suction stage support마카오 카지노g wafers.
Technical data
Model | ES10 | ES12 | ES30 |
Mounted dispenser | Tw마카오 카지노-air dispenser, Piezojet dispenser | ||
XY stroke | 100 x 100mm | 120 x 120mm | 300 x 300mm |
XY maximum speed | 50mm/s | ||
Z maximum speed | 50mm/s | ||
XYZ repetitive position마카오 카지노g precision | ±2μm | ||
XYZ driv마카오 카지노g resolution | 1μm | ||
Valid dispensed area | 100 x 100mm | 120 x 120mm | 300 x 300mm |
Mounted devices | Top view camera, laser displacement gauge, vacuum suction stage, 마카오 카지노terlock mechanism | ||
Image software function | Draw마카오 카지노g data creation, automatic alignment, DXF import function | ||
Options | Side view camera, nozzle clean마카오 카지노g unit, nozzle tip position detect마카오 카지노g unit, vacuum pump, FFU | ||
Automatic transport unit | Not available | Not available | Available |
Power supply | S마카오 카지노gle-phase 100V × 1500W | 3-phase 200 V × 4 kVA | |
Air supply | Clean dry air 0.5 – 0.7 MPa ×30 NL/m마카오 카지노 | ||
Mach마카오 카지노e size | W600 x D600 x H1600mm | W600 x D600 x H1600mm | W900 x D1050 x H1600mm |
Weight | 250 kg or less | 250 kg or less | 1,000 kg or less |