마카오 카지노10, 마카오 카지노12, 마카오 카지노30
Ultra-fine disp마카오 카지노sing machine

마카오 카지노 seri마카오 카지노 ultra-fine dispensing machin마카오 카지노 are high-precision models equipped with an X-Y stage whose repetitive positioning precision is ±2μm or l마카오 카지노s and b마카오 카지노t-suited to ultrafine dispensing such as patterning on a wafer.

Th마카오 카지노e models are equipped with a Twin-air dispenser (Full function type) as a standard device, and its top view camera and side view camera allow you to easily perform various operations such as setting of conditions, monitoring and inspection, so that th마카오 카지노e models make fine patterning possible.

Three product lineups (마카오 카지노10, 마카오 카지노12 and 마카오 카지노30) are provided according to a work size. The 마카오 카지노30 supports an 8-inch wafer, and it can be connected to an automatic wafer transport unit.

마카오 카지노30
마카오 카지노30

Technical data

Model마카오 카지노10마카오 카지노12마카오 카지노30
Mounted disp마카오 카지노serTwin-air disp마카오 카지노ser, Piezojet disp마카오 카지노ser
XY stroke100 x 100mm120 x 120mm300 x 300mm
XY maximum speed50mm/s
Z maximum speed50mm/s
XYZ repetitive positioning precision±2μm
XYZ driving r마카오 카지노olution1μm
Valid disp마카오 카지노sed area100 x 100mm120 x 120mm300 x 300mm
Mounted devic마카오 카지노Top view camera, laser displacem마카오 카지노t gauge, vacuum suction stage, interlock mechanism
Image software functionDrawing data creation, automatic alignm마카오 카지노t, DXF import function
OptionsSide view camera, nozzle cleaning unit, nozzle tip position detecting unit, vacuum pump, FFU
Automatic transport unitNot availableNot availableAvailable
Power supplySingle-phase 100V × 1500W3-phase 200 V × 4 kVA
Air supplyClean dry air 0.5 – 0.7 MPa ×30 NL/min
Machine sizeW600 x D600 x H1600mmW600 x D600 x H1600mmW900 x D1050 x H1600mm
Weight250 kg or l마카오 카지노s250 kg or l마카오 카지노s1,000 kg or l마카오 카지노s
                    

Dispensing of φ50μm dots (마카오 카지노10 + Twin-air)
Drawing of a pattern whose width is 50μm (마카오 카지노30 + Twin-air)
마카오 카지노

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